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Piezoelectric thin films can be deposited on semiconductor platforms (through a number of methods such as atomic-layer-deposition, sputtering, chemical vapor deposition (CVD), etc.) processes. Examples: aluminum nitride (AlN), zinc oxide (ZnO), lead zirconate titanate (PZT).
This report discusses the basic concepts of piezoelectric transducers used as sensors and two circuits commonly used for signal conditioning their output. Contents
contribution to piezoelectricity. The fundamental structure–property mechanisms revealed in lead-containing piezoelectric materials can be also operational in lead-free systems and at a minimum, should be consid-ered as starting guidelines for the development of lead-free piezoelectrics from the aspects of composition modification, microstructu...
Like optical and electrochemical transducers, piezoelectric transducers can be used as-is as physical sensors (to sense mass), or used with bioreceptors as biosensors (to quantify biomolecules). Collectively they are called piezoelectric sensors. 11.1 Piezoelectricity All piezoelectric sensors work on the principle of piezoelectricity. In the late
This topic is treated in depth in Chap. 11 which provides a guide to the important subject of modification of piezoelectric surfaces in piezoelectric transducers for sen-sor applications. Some additional examples have been added in this new version. Chapters 4, 6, 15-18 deal with ultrasonic systems and applications.
The book fills an urgent need for a unified source of information on piezoelectric devices and their astounding variety of existing and emerging applications. Some of the chapters focus more on the basic concepts of the different disciplines involved and are presented in a didactic manner.
frequencies up to 1000 MHz, a transducer crystal made from X-cut quartz with a fundamental frequency of 20 MHz (thickness 0.00564") will experience smaller internal losses and is easier to drive at its higher harmonics. Transducers can also be fabricated in the KHz range for low frequency work.