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A silicide is a chemical compound of silicon and a more electropositive element. Learn about the different types of silicides, their properties, reactions and uses in microelectronics and other fields.
A silicide is a compound of silicon with any metallic element, such as MoSi2 or Ni3Si. Learn about the crystal structures, physical properties, and uses of silicides in materials science, microelectronics, and thermoelectrics.
2 Αυγ 2019 · A review of transition metal silicides as intermetallic compounds and catalysts for various reactions. The article covers the properties, synthesis, structure and applications of metal silicides, as well as the challenges and issues in their development.
17 Ιουλ 2019 · Silicides are binary compounds of silicon with other metals, with various chemical and physical characteristics. Learn about the silicides of interest for microelectronics and high temperature applications, such as CoSi 2, NiSi 2, FeSi 2, WSi 2, TiSi 2 and MoSi 2.
16 Ιουν 1999 · Silicides were introduced into the technology of electronic devices some thirty years ago; since then, they have been continuously used to form both ohmic and rectifying contacts to silicon.
This chapter reviews the fundamental and technological aspects of silicides, such as electrical resistivity, stability, corrosion resistance, and crystal chemistry. It also covers the thin-film silicide research and applications in Silicon Integrated Circuits (SICs) and Very Large Scale Integration (VLSI).
A review of silicide processes and properties for CMOS devices, with emphasis on Ti, Co, Ni and Ni-based alloys. Topics include scalability, nucleation, work function, dopant effects, reliability and Si-Ge compatibility.
